Specifications

Device Processing:
• TV & Monitor picture tube manufacture
• Evacuation of lamps (motorway lighting, beamers)
• X-Ray tubes & electron devices
• Medical accelerator tubes
• Lasers
General Industrial Processes:
• Vacuum furnaces / metallurgy
• Others
Industrial Thin Film Deposition Equipment
Our expertise with both OEMs and end users in the field of
industrial vacuum equipment makes us the right partner for
your Total Vacuum Solution. In single chamber batch systems,
multiple chamber systems, with load locks, or large inline
continuous systems, Varian Vacuum Technologies has the
right turbo pump for your process requirements.
What really differentiates Varian is the expertise of its
applications, support and custom system design staff to
integrate these superior vacuum pumps into an optimized
vacuum solution. Our experts will work with you to offer the
right solutions to your particular vacuum requirements.
The Turbo-V 2K-G System:
• The first application-specific
pumping solution designed for thin
film deposition equipment
• The highest performing, most
compact unit available
• The first fully integrated approach
for maximum system productivity
and uptime.
Turbo-V Pumps
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Varian, Inc. Vacuum Technologies
Turbo
Pumps