Specifications

Pump Models
160
Pump Specification
Pumping Speed, l/s
Nitrogen
Helium
Hydrogen
Compression Ratio
Nitrogen
Helium
Hydrogen
Base pressure, mbar
with recommended mechanical pump
with recommended dry pump
Startup Time, min
Rotational Speed, rpm
Recommended Forepump
Two-stage mechanical pump
Dry pump
Inlet Flange, nominal diameter
Klamp Flange, mm
ConFlat®, mm (inches OD)
ISO clamp style, mm
ISO-F bolted, mm
Foreline Flange, nominal diameter
Klamp Flange
SEM Version Available on Request
Controllers
Rack Controller
Navigator on board Controller
Integrated Electronics
PCB Controller
Turbo-V 301 Navigator
DN 100 DN 160
250 280
220 230
200 210
7 x 10
8
7 x 10
8
1 x 10
5
1 x 10
5
1 x 10
4
1 x 10
4
< 5 x 10
-10
< 5 x 10
-10
< 5 x 10
-9
< 5 x 10
-9
2.5 2.5
56,000 56,000
DS 102 DS 102
SH-110 SH-110
--
100 (6) 160 (8)
100 160
--
NW16 NW16
••
••
••
--
••
Turbo-V 81 T
DN 40 DN 63
50 77
56 65
46 50
7 x 10
8
7 x 10
8
3 x 10
3
3 x 10
3
3 x 10
2
3 x 10
2
5 x 10
-9
5 x 10
-9
5 x 10
-8
5 x 10
-8
< 1 < 1
80,000 80,000
DS 42 - DS 102 DS 42 - DS 102
SH-110 SH-110
40 -
35 (2.75) 63 (4.5)
-63
--
NW16 NW16
--
••
••
--
••
Turbo-V 81 M
DN 40 DN 63
50 77
56 65
46 50
5 x 10
8
5 x 10
8
8 x 10
4
8 x 10
4
7 x 10
3
7 x 10
3
5 x 10
-10
5 x 10
-10
5 x 10
-9
5 x 10
-9
< 1 < 1
80,000 80,000
DS 42 - DS 102 DS 42 - DS 102
SH-110 SH-110
40 -
35 (2.75) 63 (4.5)
-63
--
NW16 NW16
--
••
••
--
••