Specifications
Turbo-V Pumps
161
Varian, Inc. Vacuum Technologies
Turbo
Pumps
Turbo-V 551 Navigator
DN 100 DN 160
350 550
450 600
450 510
> 1 x 10
9
> 1 x 10
9
1 x 10
7
1 x 10
7
1 x 10
6
1 x 10
6
< 1 x 10
-10
< 1 x 10
-10
< 1 x 10
-10
< 1 x 10
-10
< 5 < 5
42,000 42,000
DS 302 DS 302
TS300 TS300
--
100 (6) 160 (8)
- 160
- 160-F bolted
NW25 NW25
••
••
••
--
--
Turbo-V 701 Navigator
DN 200
690
620
510
1 x 10
9
1 x 10
7
1 x 10
6
< 1 x 10
-10
< 1 x 10
-10
< 5
42,000
DS 402
TS300
-
200 (10)
200
200-F bolted
NW25
•
•
•
-
-
Turbo-V 1001 Navigator
DN 160 DN 200 DN 250
790 950 1,050
820 870 900
860 900 920
1 x 10
9
1 x 10
9
1 x 10
9
1 x 10
7
1 x 10
7
1 x 10
7
1 x 10
6
1 x 10
6
1 x 10
6
<1 x 10
-10
<1 x 10
-10
<1 x 10
-10
<1 x 10
-10
<1 x 10
-10
<1 x 10
-10
< 4 < 4 < 4
38,000 38,000 38,000
DS 402 DS 402 DS 402
TS300 TS300 TS300
---
- 200 (10) -
160 200 250
-
200-F bolted 250-F bolted
NW40 NW40 NW40
•••
•••
•••
---
---
Turbo-V 3K-T System
DN 250
2,050
2,400
2,300
1 x 10
9
1.2 x 10
5
1.5 x 10
4
< 1 x 10
-9
< 1 x 10
-9
< 9
31,800
> 50 m
3
/h
-
250 (12)
-
250-F bolted
NW40
-
-
-
•
-
Turbo-V 2K-G System
DN 250
1,600
3 x 10
5
< 1 x 10
-8
< 1 x 10
-8
< 7
33,000
> 40 m
3
/h
-
-
-
250-F bolted
NW40
-
-
-
•
-