Datasheet

SPD series pressure sensor
last update
December 6, 2011
reference
SPD-dil family
page
5/5
Outline drawings and dimensions.
Ordering information Part no. Pressure range
SPD005G 0 – 0.35 10
5
Pa(Gauge)
SPD015G 0 – 1.0 10
5
Pa -
SPD030G 0 – 2.0 10
5
Pa -
SPD100G 0 – 6.5 10
5
Pa -
SPD015A 0 – 1.0 10
5
Pa(Absolute)
Connection diagram Gauge type
(Top View)
pressure port (
∅
∅∅
∅
0.8)
1 2 3
12
14
vent hole
6 5 4
2.54(2x)
R=1
2.8
6.8
0.5C
-
∅
∅∅
∅
3
8
4
All sizes in mm.
Wetted materials:
glass, ryton, silicon, fluorosilicon
and gold
0.5
2.54
3.5
Gauge type sensor
Absolute type sensor
0.25
0
.15±0.1
11±0.5
0.8±0.2
Atmospheric
Pressure inlet
@bottom
7
7
1
4
4 exc +
+
5 out
-
1 exc
-
2 exc
-
3 out +
6 n.c.
4 out
+
5 exc
1 out
-
2 exc
6 n.c.
Connection diagram Absolute type
(Top View)