Datasheet

ManualsBrandsSMC ManualsActuatorsCylinder, Double Acting, Single Rod, 75mm, Bore Size 32mm G1/8

Clean Series

ø12, ø16, ø20, ø25, ø32

ø40, ø50, ø63, ø80, ø100

Clean series

Relief type

Vacuum type

Applicable for using inside the clean room graded Class 100 by making an actuator’s rod section a double seal construction and

discharging by relief port directly to the outside of clean room.

Bore size Stroke

CQ2B

D(M)Z

Specifications

Bore size (mm)

Action

Proof pressure

Maximum operating pressure

Cushion

Piston speed

Mounting

Double acting, Single rod

1.5 MPa

1.0 MPa

None

Note)

30 to 400 mm/s

Through-hole

Note) ø12 with auto switch: With rubber bumper (Standard)

30 to 300 mm/s

12 16 20 25 32 40 50 63 80 100

For details, refer to the separate catalogue (CAT.E02-23), “Pneumatics Equipment for Clean Room.”

10-CQ2 series

(Double seal)

11-CQ2 series

(Single seal,

Vacuum suction)

Construction

A relief port is provided in the

area between the double rod

seals to discharge the exhaust air

outside of the clean room. Thus,

the amount of dust generated

has been reduced to 1/20 of that

of an ordinary cylinder.

Structurally identical to the “10-”

series, the outer rod seal has

been removed to evacuate

through the vacuum port. This

draws out any external air from

the clearance between the rod

and the cover to practically

eliminate the generation of

external dust. This should be

used in an application that

requires an even higher level of

cleanliness than the 10- series.

Vacuum port

(Vacuum suction)

Relief port

Bushing

Rod seal

Bushing

Rod seal

Copper and Fluorine-free Series (For CRT Manufacturing Process)

For preventing the influence of copper ions or halogen ions during CRT manufacturing processes,

copper and fluorine materials are not used in the component parts.

Bore size Stroke

CQ2B

D(C)(M)Z