Datasheet

Applicable Fluid Examples
 Sensor and fitting parts are electron-beam welded.
 Choice of VCR
®
or Swagelok
®
fitting is available.

Water

Hydraulic fluid (JIS-K2213)

Silicon oil (JIS-K2213)

Lubricant (JIS-K6301)

Fluorocarbon

Argon

Ammonia

Carbon dioxide

Air-containing drainage

Nitrogen
VCR
®
compliant
Swagelok
®
compliant
Confirmation of the
atmospheric pressure
of a load lock chamber
∗ VCR
®
and Swagelok
®
are registered trademarks of Swagelok Company.
Series
–0.100 to 2.00 MPa
–0.1 MPa
(–100 kPa)
2 MPa
0
ISE80H
–0.100 to 1.000 MPa
1 MPa
0
–0.1 MPa
(–100 kPa)
ISE80
0.0 to –101.0 kPa
-101kPa
0
ZSE80
–100.0 to 100.0 kPa
–100 kPa
100 kPa
0
ZSE80F
500 kPa
2 MPa
4 MPa
0.1 kPa
0.001 MPa
±0.2%F.S. ±1digit
Variations
OUT
OUT
1
2
OUT
OUT
1
2
OUT
OUT
1
2
OUT
OUT
1
2
Easy color
distinction by
pressure
range
Confirmation of working
pressure of
hydraulic
cylinder
Confirmation of
adsorption of work
pieces containing
moisture
Confirmation of pressure
after lubricator unit
Confirmation of supply
pressure of cleaning lines
Applications
Leakage
1 x 10
-10
Pa·m
3
/s
1 x 10
-5
Pa·m
3
/s
1 x 10
-10
Pa·m
3
/s
<VCR
®
- and Swagelok
®
-fitting compliant>
1 x 10
-5
Pa·m
3
/s
<Threaded type (R, Rc, NPT, G)>
Restrictor installed fitting type (-X510)
A pressure switch that has a restrictor installed in the fitting is available so that it prevents the
sensor from being damaged by water collision with rush inertia. (Refer to page 743 for details.)
Made to Order
Rated pressure range
Withstand pressure
Repeatability
Minimum unit setting
730
P0694-P0755-E.qxd 08.8.27 6:29 PM Page 730