User Guide

Doc. No. SF

∗-OMZ0013-A

-12-

Revision history

Rev. A : September, 2021

Add Carbon dioxide gas(gas)

Delete Lubrication oil

4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN

Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362

URL

http://www.smcworld.com

Note:

Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

2021-09-1615:31

DP 097499