Datasheet

Selection Graph (1) Adsorption Response Time
Max. suction flow rate Q (L/min (ANR))
Piping capacity
Arrival time of vacuum pressure (63%) T1 (sec)
Arrival time of vacuum pressure (95%) T
2 (sec)
Conversely, the size of the ejector or the size of the switching valve of the vacuum pump system can be obtained from the adsorption response time.
How to read the graph
Example 1: For obtaining the adsorption response time until the pressure in the piping system with a piping capacity of 0.02 L is
discharged to 63% (T
1
) of the final vacuum pressure through the use of the vacuum ejector ZH07S with a maximum suction flow rate of 12
L/min (ANR).
<Selection Procedure>
From the point at which the vacuum ejector’s maximum vacuum suction flow rate of 12 L/min (ANR) and the piping capacity of 0.02 L
intersect, the adsorption response time T
1
that elapses until 63% of the maximum vacuum pressure is reached can be obtained. (Sequence
in Selection Graph (1), ) T
1
0.3 seconds.
Example 2: For obtaining the discharge response time until the internal pressure in the 5 L tank is discharged to 95% (T
2
) of the final
vacuum pressure through the use of a valve with a conductance of 3.6 [dm
3
/(s·bar)].
<Selection Procedure>
From the point at which the valve’s conductance of 3.6 [dm
3
/(s·bar)] and the piping capacity of 5 L intersect, the discharge response time (T
2
)
that elapses until 95% of the final vacuum pressure is reached can be obtained. (Sequence in Selection Graph (1), ) T
2
12 seconds.
Model Selection
Adsorption Response Time from the Selection Graph
1. Tube Piping Capacity
Piping capacity from the ejector and switching valve at vacuum pump to the pad can be found in “8. Data: Piping Capacity by
Tube I.D. (Selection Graph (2)).”
2. Obtain the adsorption response times.
By operating the supply valve (switching valve) that controls the ejector (vacuum pump), the adsorption response times T1 and
T
2 that elapsed before the prescribed vacuum pressure is reached can be obtained from the Selection Graph (1).
Valve conductance
=
Q
5 x 11.1
[dm
3
/(s·bar)]
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