TELEDYNE HASTINGS INSTRUMENTS INSTRUCTION MANUAL HFM-E-200/HFC-E-202 SERIES FLOWMETERS/CONTROLLERS ISO 9001 C E R T I F I E D
Manual Print History The print history shown below lists the printing dates of all revisions and addenda created for this manual. The revision level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between revisions, contain important change information that the user should incorporate immediately into the manual. Addenda are numbered sequentially.
Table of Contents 1. INSTALLATION AND OPERATION ............................................................................................................................. 4 1.1. FEATURES .................................................................................................................................................................... 4 1.2. SPECIFICATIONS ......................................................................................................................................
1. Installation and Operation The Hastings HFM-E-200 mass Flow-meter and HFC-E-202 Flow-controller are designed to accurately measure and control mass flow over the range of 10 sccm to 30 slm, without corrections or compensations for gas pressure and temperature with an accuracy of better than ±1% FS. Hastings mass flow instruments do not require any periodic maintenance under normal operating conditions with clean gases. No damage will occur from the use of moderate overpressures (~500 psi/3.
1.2. Specifications Accuracy.............................................................................................................. ±1% full scale (F.S.) Repeatability .............................................. <±0.125% of F.S.or ±0.075% of rdg. +0.05% F.S. (max) Maximum operational pressure .............................................................................500 psi [3.45 MPa] ...................................................................................................
1.3. Optional 4-20 mA Current Output An option to the standard 0-5 VDC output is the 4-20 mA current output that is proportional to flow. The 4 - 20 mA signal is produced from the 0 - 5 VDC output of the Flowmeter. The current loop output is useful for remote applications where pickup noise could substantially affect the stability of the voltage output. The current loop signal replaces the voltage output on pin 3 of the “Edge” connector.
2. Installation and Operation This section contains the necessary steps to assist in getting a new Flowmeter/Controller into operation as quickly and easily as possible. Please read the following thoroughly before attempting to install the instrument. 2.1. Receiving Inspection Carefully unpack the Hastings HFM-E-200/HFC-E-202 series instrument and any accessories that have also been ordered. Inspect for any obvious signs of damage to the shipment.
suggested that all connections be checked for leaks after installation. This can be done by pressurizing the instrument (do not exceed 500 psig unless the Flowmeter is specifically rated for higher pressures) and applying a diluted soap solution to the flow connections rated for higher pressures) and applying a diluted soap solution to the flow connections. 2.5.
Pin 1 is the case ground. It should be connected to the cable shield if available and to the AC ground at the power supply. Pin 3 is the output signal from the flow controller. This output will be 0-5VDC, 5VDC being 100% of rated or full flow. Pin A is the command input. This should be a 0-5VDC signal and must be free of spikes or other electrical noise, as these will generate false flow commands that the controller would attempt to flow.
periodically during normal operation. Zero adjustment is required if there is a change in ambient temperature, or vertical orientation of the Flowmeter/controller. 2.6.3. High Pressure Operation When operating at high pressure, the increased density of gas will cause natural convection to flow through the sensor tube if the instrument is not mounted in a level position. This natural convection flow will be proportional to the system pressure.
2.7.3. Operation with an external sensor. (Fig. 2.2) In some instances, it might be desirable to use an external sensor to provide process information to the control circuitry in the flow controller. For example, you might want to control the pressure in a vacuum system by adjusting the rate at which the system is backfilled with a gas. The new, enhanced HFC series of flow controllers have provision for accepting a 0-5VDC output from an external sensor at pin 8 of the “Edge” connector.
3. Theory of Operation This section contains an overall functional description of HFC Flow Controllers. Detailed schematics and parts lists can be found at the end of the manual in Section 6.0. In this section and other sections throughout this manual, when a power supply is mentioned, it is assumed that the customer has a Hastings Power Supply. These sections are not applicable if another type of power supply is used. 3.1.
3.4. Figure 3.2 Shunt: Measurement of flow rates higher than the 10 sccm full scale is achieved by dividing the flow with a fixed ratio shunting arrangement, as is illustrated in Figure 3.3. This is accomplished by placing the measuring capillary tube parallel with one or more dimensionally similar channels, called a laminar flow element (LFE).
3.5. Valve: The control valve is an “automatic metering solenoid” valve. While most solenoids operate in either the fully open or fully closed state, the automatic metering solenoid valve is designed to control flow (see Figure 3.6). A spring, connected to the plunger assembly, holds a magnetic plunger tightly against an orifice to shut off flow.
4. Maintenance This section contains service and calibration information. Some portions of the instrument are delicate. Use extreme care when servicing the flow controller. The potentiometer positions and the electrical components referred to in the troubleshooting section can be found in Section 6.0 on the electrical component layout drawing. 4.1. Authorized Maintenance With proper care in installation and use, the flow controller will require little or no maintenance.
SYMPTOM: Flow controller oscillates. CAUSE: Flow controller not adjusted for the dynamics of the flow system. ACTION: Check upstream and downstream pressures. The gas supply regulator should not have excessive lockup when flow shuts off. Also ensure that there is not a large drop in pressure between the regulator and the instrument due to line resistance. Oscillations can also be caused if a large flow restriction is pneumatically close to the downstream end of the flow controller.
4.3.2. Miscellaneous adjustments Periodically, during normal operation, the ZERO should be checked and adjusted when required. If the instrument is not stopping the flow completely when command signal is Zero, the orifice may require turning approximately 1/8 turn clockwise. 4.4. Inlet Removal: The fitting on the inlet side must be removed to gain access to the filter or shunt assembly. First shut off the supply of gas to the instrument.
Where: Formula 1: 0.0028σQ Pu D= Formula 2: D= 0.0014Q ΔΡ • Ρd σ D = Diameter in inches Q = Flow rate in standard liters per minute P = Pu - Pd in PSI Pu = Upstream pressure in PSIA Pd = Downstream pressure in PSIA σ = Specific gravity of gas Choose the orifice form Section 5.0 that has the closes larger diameter to the calculated diameter. 4.7.1.
4.8. REPLACEMENT PARTS The following is a list of the available replacement parts and their factory stock numbers. The HFM-E200 and the HFC-E-202 shunts and sensor modules are interchangeable. STOCK NO. DESCRIPTION AIR RANGE 81-270 30L - Shunt 24 - 36 81-269 20L - Shunt 16 – 24 81-268 10L - Shunt 8 – 12 81-267 5L - Shunt 4–6 81-266 2L - Shunt 1.6 - 2.4 1L - Shunt 0.8 – 1.
5. Conversion Factor Table Rec # Gas Symbol GCF Derived Density (g/L) 25°C Density (g/L) 0°C / 1 atm Synonyms Gamma R Z (Cp/Cv) / 1 atm 25 J/gm*K 1 Acetic Acid C2H4F2 0.4155 4 2.700 - 2.947 - Ethanoic Acid 1.2 125.88 2.0301 2 Acetic Acid, Anhydride C4H6O3 0.2580 4 4.173 - 4.555 - Aceticanhydride 1.2 81.44 2.3384 3 Acetone C3H6O 0.3556 4 2.374 - 2.591 - 2-propanone 1.2 143.16 1.7504 4 Acetonitryl C2H3N 0.5178 4 1.678 - 1.832 - Methyl Cyanide 1.
48 Difluoroethylene C2H2F2 0.4492 4 2.617 - 2.857 - 49 Dimethylamine C2H7N 0.3705 4 1.843 - 2.011 - 50 Dimethyl Ether C2H6O 0.4088 4 1.883 - 2.055 - Vinylidenefluoride, G-1132A, Difluoroethene 1.2 129.85 2.0457 51 Dimethyl Sulfide C2H6S 0.3623 4 2.540 - 2.772 - N-methylmethanamine Methylether; Methane, Oxybis2-thiopropane, Thiobismethane 1.2 184.42 1.4793 1.2 180.48 1.5211 52 Divinyl C4H6 0.3248 4 2.211 - 2.413 - 1,3-butadiene 1.2 133.81 1.8455 1.
99 Isopentane C5H12 0.2175 4 2.949 - 3.219 - 2-methylbutane 1.2 115.24 100 Isopropyl Alcohol C3H8O 0.2931 4 2.456 - 2.681 - 2- propanol 1.2 138.356 1.8975 1.7335 101 Isoxazole C3H3NO 0.4333 4 2.823 - 3.081 - 1-Oxa-2-azacyclopentadiene 1.2 120.39 2.1501 102 Ketene C2H2O 0.5732 4 1.718 - 1.875 - NA 1.2 197.79 1.5127 103 Krypton Kr 1.4042 4 3.425 - 3.739 - NA 1.6 99.22 1.0000 104 Methane CH4 0.7787 1 0.656 - 0.716 - NA 1.31 518.28 0.
6.823 - 1,2-Dichloro-1,2,2trifluoroethane 1.2 54.37 3.1065 - 5.355 - Pentafluoroethane 1.2 66.50 2.6844 - 4.552 - 1,1,2,2-tetrafluoroethane 1.2 78.42 2.4595 - 4.552 - 1,1,1,2-tetrafluoroethane 1.2 78.42 2.5001 3.435 - 3.750 - 1,1,2-trifluoroethane 1.2 95.52 2.2693 4 3.435 - 3.750 - 1,1,1-trifluoroethane, Methylfluoroform 1.2 95.52 2.2533 0.3877 4 2.700 - 2.947 - 1,1-Difluoroethane 1.2 122.18 1.9753 C3F8 0.1818 4 7.685 - 8.
6. WARRANTY 6.1. Warranty Repair Policy Hastings Instruments warrants this product for a period of one year from the date of shipment to be free from defects in material and workmanship. This warranty does not apply to defects or failures resulting from unauthorized modification, misuse or mishandling of the product. This warranty does not apply to batteries or other expendable parts, or to damage caused by leaking batteries or any similar occurrence.
7. Drawings 7.1. Notes: 1. Place jumper (Item 42) on pins 4 and 5 of P2 and P3 as shown. 2. Place one on bottom two pins (1 and 2) of JP3. 3. Place one on both pins of JP6.
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