MODEL 452 PROCESS OZONE SENSOR ©Teledyne Instruments Advanced Pollution Instrumentation Division (T-API) 9480 Carroll Park Drive San Diego, CA 92121-5201 TOLL-FREE: TEL: FAX: E-MAIL: WEB SITE: 800-324-5190 858-657-9800 858-657-9816 api-sales@teledyne.com www.teledyne-api.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E SAFETY MESSAGES NOTE The M452 contains no user serviceable parts. CAUTION There is risk of dangerous UV exposure when the cover is removed from the sensor. Take necessary precautions to avoid exposure. CAUTION High voltages exist inside the sensor. Please use caution when sensor cover is removed.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E TABLE OF CONTENTS SAFETY MESSAGES............................................................................ I TABLE OF CONTENTS .................................................................... III LIST OF FIGURES ...............................................................................V LIST OF TABLES .................................................................................V WARRANTY POLICY.................................
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 5 SENSOR AND SYSTEM TROUBLESHOOTING ...................... 5-1 5.1 STATUS LED’S ............................................................................. 5-1 5.2 STATUS OUTPUTS ......................................................................... 5-2 5.3 SENSOR O.K................................................................................. 5-2 5.4 INVALID READING ....................................................................
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E LIST OF FIGURES FIGURE 2-1: FIGURE 2-2: FIGURE 4-1: FIGURE 4-2: M452A HIGH PURITY OZONE SENSOR .............................. 2-1 PRESSURE DROP VS. FLOW (HIGH PURITY VERSION)........ 2-3 ELECTRICAL CONNECTIONS .............................................. 4-2 DIGITAL OUTPUT CONNECTIONS ....................................... 4-4 LIST OF TABLES TABLE 5-1: STATUS OUTPUTS ...............................................................
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E WARRANTY POLICY ADVANCED POLLUTION INSTRUMENTATION DIVISION 02024c Prior to shipment, Teledyne API equipment is thoroughly inspected and tested. Should equipment failure occur, Teledyne API assures its customers that prompt service and support will be available.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E THE WARRANTIES SET FORTH IN THIS SECTION AND THE REMEDIES THEREFORE ARE EXCLUSIVE AND IN LIEU OF ANY IMPLIED WARRANTIES OF MERCHANTABILITY, FITNESS FOR PARTICULAR PURPOSE OR OTHER WARRANTY OF QUALITY, WHETHER EXPRESSED OR IMPLIED. THE REMEDIES SET FORTH IN THIS SECTION ARE THE EXCLUSIVE REMEDIES FOR BREACH OF ANY WARRANTY CONTAINED HEREIN.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 1 Product Descriptions 1.1 M452 Process Ozone Sensor The Teledyne API M452 is a microprocessor-based sensor for measuring the concentration of gaseous ozone in processes such as semiconductor wafer fabrication, water treatment, and ozone research. The M452 can be used as a full flow process sensor or as a sensor to monitor a small flow of gas diverted from a process stream.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 2 Specifications Note: All specifications contained herein are subject to change without notice. Please contact Teledyne API to obtain the current specifications. 2.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 2.2 Performance Specifications Accuracy: Repeatability: Response Time: Zero Drift: ±1% of Full Scale. 1% of Full Scale 2 sec. To 95% 1% Full Scale/month (non –cumulative) 2.3 Operating Limits Measurement Range: Proof pressure: Flow: Temperature range: Warm-Up Period: 5, 10, 15, 20% w/w 25, 50, 100, 200, 400 g/Nm3 115 psia 0.1-5.0 LPM (See Figure 2-2) 5 to 45 °C 15 minutes 2.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 2.6 Pressure Drop Figure 2-2 below shows the approximate pressure drop from the inlet fitting to the outlet fitting as a function of volumetric flow rate. Pressure Drop vs. Flow 1.000 y = 0.0008x2 + 0.0048x ∆P (psi) 0.800 0.600 0.400 0.200 0.000 0 5 10 15 20 Flow (LPM) Figure 2-2: Pressure Drop vs.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 2.7 Options The M452 is available with the following options: 2.7.1 AC Power Adapter This option consists of a Universal Input (100-240 VAC, 50-60Hz) Power Adapter with a standard IEC320 modular AC receptacle. A North American standard 3 prong power cord is also provided. 2.7.2 Ozone Destructor (1/4” Tube Fittings) This option consists of an external catalytic Ozone Destructor for connecting to the gas outlet of the M452.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 3 Theory of Operation The detection of ozone molecules is based on absorption of 254 nm UV light due to an internal electronic resonance of the O3 molecule. The Model 452 uses a mercury lamp constructed so that a large majority of the light emitted is at the 254 nm wavelength. Light from the lamp shines through an absorption cell through which the sample gas being measured is passed.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E The intensity of light is converted into a voltage by the detector/preamp module. The voltage is converted into a number by a voltage-to-frequency (V/F) converter capable of 80,000 count resolution. The digitized signal, along with the other variables, is used by the CPU to compute the concentration of ozone using the above formula.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 4 Installation 4.1 Unpacking Upon receiving the M452 please verify that no apparent shipping damage has occurred. If damage has occurred please advise shipper first, then Teledyne API. 4.2 Mechanical Installation Mount the M452 to a stable platform using four #8-32UNC screws. See Figure 2-1 for mounting hole dimensions.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E Ozone Concentration Meter (0-5 VDC) or Data Acqusition Device - + Power Supply +15V Common Analog Out Digital Out #2 Status Display or PLC Analog Out + Digital Out #3 Power Common Digital Out #4 +15 Volt Supply Digital Out Common +15 Volt Supply RS485-A Digital In #1 Zero Cal = Closed RS485-B Digital In #2 Power Common Digital Out #1 Figure 4-1: Electrical Connections 4.3.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 4.3.2 Analog Output The analog output is a 0-5 volt signal representing the ozone concentration measured by the sensor. The output is scaled to the concentration range that the sensor has been set to measure. Check the serial number label on the M452 to determine the concentration range. For best performance, the analog output should be connected to a voltmeter or A/D converter with a differential input and a minimum input impedance of 2KΩ.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 4.3.4 Status Outputs The M452 has four digital status outputs for indicating error status and when operational parameters have moved out of normal limits. These outputs are in the form of opto-isolated open-collector transistors. They can be used to drive status LED’s on a display panel or interface to a digital device such as a Programmable Logic Controller (PLC).
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 4.3.5 RS232/485 Interface The M452 features a bi-directional digital serial interface that can be used for sensor control and data acquisition. Please contact Teledyne API for documentation on the use of the RS232/485 interface.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 4.4 Gas Connections Gas connections to the M452 are made using ¼” compression tube fittings (M452) or ¼” VCR™ face seal fittings (M452A.) The ¼” compression fittings can be used with ¼” O.D. Stainless Steel or Teflon™ tubing. The M452 is not sensitive to flow direction; it does not matter which of the two fittings is used as the gas inlet.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 4.5 Start-Up and Calibration Procedure 1. Verify that the proper electrical connections have been made (See Section 4.3) and apply power to the M452. Allow the M452 to warm up for at least 15 minutes. 2. Purge the M452 with zero gas (usually oxygen) at a minimum flow rate of 0.1 LPM for at least 2 minutes. 3. Check that the Status Outputs (See Section 4.3.4) are in their normal states and no errors are indicated. 4.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 5 Sensor and System Troubleshooting This chapter gives guidelines for diagnosing system and sensor malfunctions using the four digital Status Outputs provided by the M452. All troubleshooting should be done after the M452 has been turned on and allowed to warm up for at least 15 minutes. 5.1 Status LED’s On the top of the M452 are five status LED’s. The Status LED labeled ‘CPU STATUS’ is used to verify the status of the CPU inside the M452.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 5.2 Status Outputs Table 5-1 below describes the function of the status outputs. More details as to the meaning of the status outputs are described in the following sections. Table 5-1: Status Outputs Output # Name On State Off state 1 Sensor O.K.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 5.4 Invalid Reading The normal state for the Invalid Reading output is OFF. If this output turns on, this indicates that the M452 is still operational, but a system fault or calibration fault exists that may make the current ozone reading invalid. The Invalid Reading output is turned on for any of the following conditions: 1. When the measured pressure in the M452 exceeds 45 psia. 2.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E 5.6 Cell Dirty The normal state for the Cell Dirty output is OFF. If this output turns on, then the ratio of the measure detector to the reference detector (at zero) is < 0.5. This value is calculated when the zero calibration is performed. When this output is on, it indicates a loss of optical transmission through the windows in the absorption cell or a calibration fault. 5.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev.
