User Guide

The cassette receptacle contains two protective glass cassettes:
■
Process protective glass cassette.
■
Objective protective glass cassette.
The objective protective glass cassette protects the objective
lens when the process protective glass cassette has been
removed.
The protective glass monitoring module is used on the BEO
D50 with a protective glass monitoring unit (see "BEO D50
Smart cassette receptacle with protective glass cassettes",
pg. 3‐30).
The objective is always equipped with a cooling unit and must
be cooled with mean laser powers above 600 W.
The cooled components are connected in series in the cooling
circuit. The cooling water passes the components in the follow-
ing order:
■
Plug receptacle – collimator – objective.
The supply always reaches the plug receptacle first.
■
Plug receptacle D - collimator – cooling block – objective –
LLK-D plug.
The supply always reaches plug receptacle D first.
The hose system is designed as shown in example (see
"Fig. 3-23", pg. 3‐29).
3‐28
Components
2020-01 22-50-17-CRen
Cooling unit
LLK-A
LLK-D and LLK-B with
adapter