User Guide

4.3 Replacing the protective glass of the lens
protection (additional protective glass)
5‐15
4.4 Cleaning the protective glass in the process
protective glass cassette
5‐18
4.5 Changing the protective class of the process
protective glass cassette
5‐19
4.6 Changing the protective glass of the objec-
tive protective glass cassette
5‐23
4.7 Cleaning the splash guard 5‐27
4.8 Mounting the crossjet in a different position 5‐27
4.9 Cleaning the attachment parts 5‐29
4.10 Replacing the sensor block 5‐29
4.11 Replacing the protective glass monitoring
module
5‐30
4.12 Cooling water 5‐31
Draining cooling water from the focusing
optics
5‐31
5‐2
Maintenance
2020-01 22-50-17-CRen