om va c .c w .
w .in w w om .
.in w w w co m c.
.in w w w co m c.
ISTRUZIONI PER L’USO .................................................................................................... 1 GEBRAUCHSANLEITUNG ................................................................................................. 3 MODE D’EMPLOI ................................................................................................................ 5 INSTRUCCIONES DE USO ................................................................................................
ISTRUZIONI PER L'USO INFORMAZIONI GENERALI PERICOLO! ATTENZIONE! NOTA .c INSTALLAZIONE fin Le note contengono informazioni importanti estrapolate dal testo. IMMAGAZZINAMENTO Non installare e/o utilizzare la pompa in ambienti esposti ad agenti atmosferici (pioggia, gelo, neve), polveri, gas aggressivi, in ambienti esplosivi o con elevato rischio di incendio.
ISTRUZIONI PER L'USO , PERICOLO! Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento. L'elevata temperatura può causare lesioni alle persone. NO! ATTENZIONE! om Per la mandata all'aria della pompa utilizzare aria o gas inerte esente da polvere o particelle. La pressione di ingresso attraverso l'apposita porta deve essere inferiore a 2 bar (oltre la pressione atmosferica).
GEBRAUCHSANLEITUNG GEFAHR! Die Pumpe darf nicht in Umgebungen benutzt werden, die ungeschützt vor Wetter (Regen, Frost, Schnee), Staub und aggressiven Gasen sind und in denen Explosions- und erhöhte Brandgefahr besteht. Beim Betrieb müssen folgende Umgebungsbedingungen eingehalten werden: ite ACHTUNG! .c INSTALLATION Die Gefahrenhinweise lenken die Aufmerksamkeit des Bedieners auf eine spezielle Prozedur oder Praktik, die bei unkorrekter Ausführung schwere Verletzungen hervorrufen können.
GEBRAUCHSANLEITUNG Damit die Flanschgrenztemperatur der Turbopumpe 120°C nicht überschreitet, sollte immer bei ausheizbaren Vakuumsystemen die TP mit Wasserkühlung arbeiten. , GEFAHR! Während des Ausheizens dürfen weder die Pumpe noch eventuelle heiße Anschlußteile berührt werden, denn es besteht Verbrennungsgefahr. NEIN! ACHTUNG! om Für die Belüftung der Pumpe trockene staub - und partikelfreie Luft, oder Edelgase verwenden.
MODE D’EMPLOI , DANGER! ATTENTION! .c INSTALLATION Ne pas installer et/ou utiliser la pompe dans des milieux exposés à des agents atmosphériques (pluie, gel, neige), à des poussières, à des gaz de combat ainsi que dans des milieux explosifs ou à risque élevé d'incendie.
MODE D’EMPLOI réchauffeur optionnel. Pendant le chauffage éventuel de la chambre à vide, la température de la bride d'entrée ne doit pas dépasser 120°C. Utiliser toujours le refroidissement par eau pendant les opérations de chauffage. Utiliser toujours le refroidissement par eau pendant les opérations de chauffage. NON! , DANGER! om Eviter de toucher la turbopompe ainsi que ses accessoires éventuels pendant les opérations de chauffage. La température élevée peut causer des lésions aux personnes.
INSTRUCCIONES DE USO ¡PELIGRO! No instalar ni utilizar la bomba en ambientes expuestos a agentes atmosféricos (lluvia, hielo, nieve), polvos, gases agresivos, en ambientes explosivos o con alto riesgo de incendio. Durante el funcionamiento es preciso que se respeten las condiciones ambientales siguientes: − presión máxima: 2 bar por encima de la presión atmosférica − temperatura: de +5°C a + 35°C − humedad relativa: 0 - 95% (no condensadora) ite ¡ATENCION! .
INSTRUCCIONES DE USO , ¡PELIGRO! No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento. La alta temperatura puede provocar lesiones a las personas. NO! ¡ATENCION! om Para el envío de aire de la bomba utilizar aire o gas inerte sin polvo o partículas. La presión de entrada a través de la puerta apropiada deberá ser inferior a 2 bar por encima de la presión atmosférica.
INSTRUÇÕES PARA O USO INFORMAÇÕES GERAIS ATENÇÃO! OBS INSTALAÇÃO Não instalar e/ou usar a bomba em ambientes expostos a agentes atmosféricos (chuva, gelo, neve), poeiras, gases agressivos, em ambientes com possibilidade de explosão ou com elevado risco de incêndio. Durante o funcionamento é necessário que sejam respeitadas as seguintes condições ambientais: − pressão máxima: 2 bar além da pressão atmosférica − temperatura: de + 5ºC a + 35ºC − humidade relativa: 0 - 95% (não condensante).
INSTRUÇÕES PARA O USO sempre o resfriamento com água durante as operações de aquecimento. Utilizar sempre o resfriamento com água durante as operações de aquecimento. NÃO! , PERIGO! Não tocar a turbobomba e os seus eventuais acessórios durante as operações de aquecimento. A elevada temperatura pode causar lesões às pessoas.
GEBRUIKSAANWIJZINGEN , GEVAAR! ATTENTIE! .c INSTALLATIE Bij dit symbool staat tekst met procedures die, indien niet opgevolgd, schade aan apparatuur kunnen veroorzaken. fin OPMERKING De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht. OPSLAG De pomp mag niet geïnstalleerd en/of gebruikt worden in ruimten die blootgesteld zijn aan de weersomstandigheden (regen, vorst, sneeuw), stof, agressieve gassen, of in ruimten met explosiegevaar of zeer hoog brandgevaar.
GEBRUIKSAANWIJZINGEN Om een betere grensdruk te bereiken, kan het pomphuis verwarmd worden met behulp van een optionele verwarmingsunit. Tijdens de eventuele verwarming van de vacuümkamer mag de temperatuur op de inlaatflens niet meer dan 120° C bedragen. Pas tijdens het verwarmen altijd waterkoeling toe. NEE! , GEVAAR! om Raak de pomp en eventuele accessoires niet tijdens het verwarmen aan. De hoge temperatuur kan lichamelijk letsel veroorzaken.
BRUGSANVISNING ALMENE OPLYSNINGER .c BEMÆRK ADVARSEL! Advarslerne henkalder operatørens opmærksomhed på et indgreb eller en særlig handling, der kan forårsage alvorlig fare for kvæstelser, hvis den ikke udføres korrekt. MONTERING PAS PÅ Pumpen må ikke installeres eller bruges i omgivelser, der udsætter den for forvitring (regn, frost, sne), støv, ætsende luftarter, og heller ikke i omgivelser med eksplosionsfare eller stor brandfare.
BRUGSANVISNING , ADVARSEL! Rør ikke ved turbopumpen eller eventuelt tilbehør under opvarmningsmanøvrerne. Den høje temperatur kan forårsage kvæstelser på personer. NEJ! PAS PÅ om Til pumpens luftafløb anvendes luft eller en inaktiv luftart, der er fri for støv og partikler. Indgangstrykket gennem den særlige åbning skal være under 2 bar.
BRUKSANVISNING ALLMÄN INFORMATION .c VARNING! OBSERVERA Varningsmeddelandena informerar operatören om att en speciell procedur eller en viss typ av arbete måste utföras exakt enligt anvisningarna. I annat fall finns risk för svåra personskador. INSTALLATION VIKTIGT OBSERVERA FÖRVARING Installera inte pumpen i miljöer som utsätts för påverkan från atmosfären (regn, snö, is), damm, aggressiva gaser, och inte heller i explosiv eller brandfarlig miljö.
BRUKSANVISNING Under uppvärmningen måste vattenkylningen användas. , VARNING! Vidrör inte turbopumpen eller några uppvärmningen för att undvika brännskador. NEJ tillbehör under VIKTIGT om Använd luft eller ädelgas, fri från damm och partiklar för luftning av pumpen. Trycket vid inloppet får vara högst 2 bar (över atmosfäriskt tryck). , VARNING! .c Peta aldrig med fingrar eller föremål i turbopumpens inlopp för att undvika skador. Användning av skyddsgaller (tillval) rekommenderas starkt.
BRUKERVEILEDNING GENERELL INFORMASJON .c MERK ADVARSEL! Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsmåte eller praksis som, hvis den ikke følges, kan medføre alvorlige skader. INSTALLASJON FORSIKTIG Ikke installer eller bruk pumpen i miljøer som utsettes for regn, snø eller is, støv, aggressive gasser, eksplosjonsfarlige miljøer eller miljøer med stor brannfare.
BRUKERVEILEDNING , ADVARSEL! Ikke berør turbopumpen eller noe av tilleggsutstyret under oppvarmingen. De høye temperaturene kan føre til brannskader. NEI FORSIKTIG om Bruk støv- og partikkelfri luft eller inaktiv gass ved lufting av pumpen. Trykket ved inngangen må ikke være mindre enn 2 bar (over atmosfærisk trykk). , ADVARSEL! For å unngå skader må du aldri stikke fingrer eller andre gjenstander inn i inngangen til turbopumpen.
KÄYTTÖOHJEET YLEISIÄ TIETOJA VAARA! .c ASENNUS Pumppua ei tule asentaa eikä käyttää ympäristössä, missä se joutuu kosketuksiin sateen, jään tai lumen, pölyn tai agressiivisten kaasujen kanssa tai joissa on olemassa räjähdys- tai tulipalovaara. Käytön aikana on tarpeellista noudattaa seuraavia ympäristöä koskevia ehtoja: − maksimipaine: 2 bar, paitsi atmosfäärinen paine − lämpötila: + 5°C - +35°C − suhteellinen kosteus: 0 - 95 % (ei tiivistävä).
KÄYTTÖOHJEET kuumenninta. Tyhjiökammion mahdollisen kuumentamisen aikana ei sisäänjohtavan laipan lämpötila saa olla yli 120 °C. Käyttäkää aina kuumentamisen aikana vettä jäähdytykseen. , EI! VAARA! Älkää koskeko turbopumppuun tai sen lisäosiin kuumentamisen aikana. Korkea lämpötila voi saada aikaan henkilöiden loukkaantumisia. Päästettäessä pumppuun ilmaa tulee käyttää ilmaa tai jalokaasua, joissa ei ole pölyä tai hiukkasia.
ODHGIES CRHSHS GENIKES PLHROFORIES .c KINDUNOS! SHMEIWSH H antl∂a den katastr◊fetai e£n aplèj ekteqe∂ ston atmosfairikÒ a◊ra. Saj sumbouleÚoume Òmwj na thn kratˇsete kleistˇ m◊cri th stigmˇ pou qa egkatastaqe∂ sto sÚsthma, ◊tsi èste na apofeucqe∂ h endecÒmenh rÚpansh apÒ th skÒnh. va c , Oi ende∂xeij kindÚnou elkÚoun thn prosocˇ tou ceiristˇ se mia diadikas∂a ˇ se mia eidikˇ ergas∂a h opo∂a e£n den ekteleste∂ swst£, qa mporoÚse na prokal◊sei sobar◊j proswpik◊j bl£bej.
ODHGIES CRHSHS , KINDUNOS! Mhn agg∂zete thn tourmpoantl∂a kai ta di£fora exartˇmat£ thj kat£ tij ergas∂ej q◊rmanshj. H uyhlˇ qermokras∂a mpore∂ na prokal◊sei proswpik◊j bl£bej. OCI PROSOCH! om Gia na dioceteÚsete me a◊ra thn antl∂a crhsimopoie∂ste a◊ra ˇ adran◊j a◊rio kaqarÒ apÒ skÒnh ˇ £lla stoice∂a. H p∂esh eisÒdou diam◊sou thj eidikˇj pÒrtaj, pr◊pei na e∂nai mikrÒterh apÒ 2 bar.
INSTRUCTIONS FOR USE GENERAL INFORMATION The warning messages are for attracting the attention of the operator to a particular procedure or practice which, if not followed correctly, could lead to serious injury. CAUTION Do not install or use the pump in an environment exposed to atmospheric agents (rain, snow, ice), dust, aggressive gases, or in explosive environments or those with a high fire risk.
INSTRUCTIONS FOR USE , WARNING! Do not touch the turbopump or any of its accessories during the heating process. The high temperatures may cause burns. NO! CAUTION om Use air or inert gas free from dust or particles for venting the pump. The pressure at the vent port must be less than 2 bar (above atmospheric pressure). CAUTION Avoid impacts, oscillations or harsh movements of the pump when in operation. The bearings may become damaged.
TECHNICAL INFORMATION The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings installed on the forevacuum side of the pump. DESCRIPTION OF THE TURBOPUMP The Turbo-V550 pump is available in four versions which differ only in their inlet flange. They are: The static blades of the stator are made of stainless steel. These are supported and accurately positioned by spacer rings.
TECHNICAL INFORMATION TECHNICAL SPECIFICATION Pumping speed fin ite va c .c om The following figure shows the Turbo-V550 pump outline drawing. Dimensions are in inches [mm]. With CFF 8” or ISO 160: N2: 550 l/s He: 600 l/s H2: 510 l/s With CFF 6” or ISO 100: N2: 350 l/s He: 450 l/s H2: 450 l/s Operating ambient temperature + 5° C to + 35° C flow: 200 l/h (0.89 GPM) temperature: + 10° C to + 30° C pressure: 3 to 5 bar (45 to 75 Psi) Bakeout temperature 120° C at inlet flange max.
.c om TECHNICAL INFORMATION w .
TECHNICAL INFORMATION The screen can be mounted on each pump. INLET SCREEN INSTALLATION ite The inlet screens mod. 969-9302 and 969-9304 prevents the blades of the pump from being damaged by debris greater than 0.7 mm diameter. va c .c om The screen can be removed as shown in the following figure. The inlet screen, however, does reduce the pumping speed by about 10%.
TECHNICAL INFORMATION Switch on the heater while the turbopump is in operation. In the event of turbopump overheat, the pump will be automatically cut out by the thermistor sensor. HEATER BAND INSTALLATION om NOTE The turbopump must be "baked" only when operating with an inlet pressure less than 10-4 mbar and with water cooling. CAUTION The heater band model 969-9808 and 969-9807 can be used to heat the pump casing when a bakeout is needed.
TECHNICAL INFORMATION The assembled kit must be screwed into the suitable holes of the pump body with a recommended closing torque of 5 Nm. WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The metallic model is assembled as shown in the figure. va c .c om The two model part numbers are: 969-9337 (metallic model), and 969-9347 (plastic model).
va c .c om TECHNICAL INFORMATION Position the fan on the pump, ensuring that the holes in the plate line up with those in the pump base. Insert the respective washers and screws and tighten with a screwdriver. Connect the fan to the controller. w .in fin ite AIR COOLING KIT INSTALLATION w A fan kit model 969-9314 is available for air cooling the pump. Fan specification: − air flow: 25 l/s (51 CFM) w − input voltage: 120 Vac 50-60 Hz − maximum power: 17 W − dimensions: 119 x 119 mm (4.69 x 4.
TECHNICAL INFORMATION GAS PURGE VALVE INSTALLATION VENT VALVE INSTALLATION om A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump. To install the gas purge valve it is necessary to unscrew the purge port cover as shown in the following figure, .c The vent valve mod. 969-9833 allows to avoid undesired venting of the pump during a temporary power failure (5 sec maximum), and enables an automatic vent operation. w .
TECHNICAL INFORMATION Tighten the valve using a 16 mm. hexagonal spanner with a torque of 2.5 Nm. Unscrew and remove the threaded plug (see figure below). CAUTION va c .c om Do not overtighten the valve as this may damage the thread on the pump. Screw the flange mod. 969-9109 on the pump, taking care of the o-ring right position. w w .in fin VENT DEVICE INSTALLATION ite Assemble the seal ring and lock the vent device in position using the KF klamp. w The vent device mod.
TECHNICAL INFORMATION 13. Turbopump VIBRATION ISOLATOR INSTALLATION Four vibration isolators for ISO and CFF inlet flange version pumps are available as accessories. The four model part numbers are the following: 14. Fan 15. Flexible connection Connection A - HIGH VACUUM FLANGE − model 969-9342 for ISO 100 flange; To connect the Turbo-V550 pump to the ISO inlet flange, remove the outer ring and position the centering ring as shown in the figure.
TECHNICAL INFORMATION Connection B - FORE-VACUUM PUMP Connection C - ELECTRICAL ite A flange KF 25 NW is available to connect the Turbo-V550 to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid pipe is used, any vibration generated by the mechanical pump must be eliminated through the use of bellows. va c .c om Connection configurations w .in fin NOTE The Turbo-V550 is characterized by its high compression ratio also for oil vapors.
TECHNICAL INFORMATION PUMP USED WITH CORROSIVE GASES Adjust the pressure regulator in order to read a gas flow rate of 0.1 to 0.8 mbar l/s. CAUTION To prevent bearing damage, Varian suggests a minimum purge gas flow rate of 10 sccm (0.17 mbar l/s). This value can be exceeded, according to the process requirements. Please contact Varian for specific applications.
TECHNICAL INFORMATION ACCESSORIES Inlet screen, ISO 160 969-9304 Heater band, 120 V 969-9808 Heater band, 220 V 969-9807 Water cooling kit 969-9337 Plastic water cooling kit 969-9347 Air cooling kit 969-9314 Vibration damper, ISO 100 969-9344 Vibration damper, CFF 6” 969-9334 Vibration damper, ISO 160 969-9345 Vibration damper, CFF 8” 969-9335 Vent flange NW 10 KF 969-9109 Vent valve with fixed delay time 969-9833 Vent device with adjustable delay time 969-9831 Forepump DS 302, w
Request for Return 2. 3. 4. A Return Authorization Number (RA#) WILL NOT be issued until this Request for Return is completely filled out, signed and returned to Varian Customer Service. Return shipments shall be made in compliance with local and international Shipping Regulations (IATA, DOT, UN).
Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION Vertical Horizontal Upside-down Other: ………………….
Sales and Service Offices Germany and Austria Varian Deutschland GmbH UK and Ireland Varian Ltd. Sucursal Argentina Av. Ricardo Balbin 2316 1428 Buenos Aires Argentina Tel: (54) 1 783 5306 Fax: (54) 1 786 5172 Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel: (49) 6151 703 353 Fax: (49) 6151 703 302 28 Manor Road Walton-On-Thames Surrey KT 12 2QF England Tel: (44) 1932 89 8000 Fax: (44) 1932 22 8769 Australia Varian Australia Pty Ltd.
