Instructions

Table Of Contents
1.4 Block diagram
Amp
Temperature
sensor
ADC
Control logic
&
Calibration
MUX
Data
registers
Digital
interface
Pressure sensing
MEMS cell
SDA
SCL
Oscillator &
Clock generator
Voltage
regulator
T
P
EEPROM
Internal control
registers
DAC
Analog
output
VOUT
VDDVDD
Figure 1: Block diagram
MEMS based piezo-resistors embedded on a suspended silicon membrane is the prima-
ry sensing element of the device. The piezo-resistors, connected in a Wheatstone bridge
configuration produce analog output voltage proportional to the applied pressure.
Analog output is converted to the digital values through delta-sigma analog-to-digital con-
verter (ADC).The ASIC embeds a high-resolution temperature sensor which is used for in-
ternal compensation of the pressure signal.
Each sensor is calibrated at three temperature and three pressure points. The trimming
parameters and calibration coefficients (stored in the on-chip EEPROM) are used for the
digital signal correction. The digital pressure values are available for the user to read via
digital I
2
C interface.
Additionally, the sensors also provide optional digital temperature values for the temperature
measurements via embedded temperatue sensor.
Pressure values are also available as an analog voltage output. 11-bit digital to analog
converter (DAC) embedded in the ASIC provides a calibrated analog voltage output through
the VOUT pin.
Differential Pressure Sensor, Part Nr. 25131308xxx01
User manual version 1.0 © August 2019
www.we-online.com/sensors 7